发明授权
US07393721B2 Semiconductor chip with metallization levels, and a method for formation in interconnect structures
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具有金属化水平的半导体芯片,以及在互连结构中形成的方法
- 专利标题: Semiconductor chip with metallization levels, and a method for formation in interconnect structures
- 专利标题(中): 具有金属化水平的半导体芯片,以及在互连结构中形成的方法
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申请号: US11127782申请日: 2005-05-12
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公开(公告)号: US07393721B2公开(公告)日: 2008-07-01
- 发明人: Andreas Huber , Günter Gerstmeier , Michael Bernhard Sommer
- 申请人: Andreas Huber , Günter Gerstmeier , Michael Bernhard Sommer
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Slater & Matsil, L.L.P.
- 优先权: DE102004023462 20040512
- 主分类号: H01L21/82
- IPC分类号: H01L21/82
摘要:
A metallization surface (5), which acts as an etching stop layer during the production of openings (4) in a passivation layer (3) applied to its upper face and protects an interconnect structure (6) arranged underneath it, is arranged in an uppermost metallization level (1). A further opening is produced in the metal surface (5), through which a focused ion beam is aimed at the interconnect structure (6) in order to connect interconnects to one another and/or to interrupt at least one interconnect. The wiring of the integrated circuit can thus be varied individually, starting from identically produced semiconductor chips.
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