Invention Grant
- Patent Title: Micromirror array device with electrostatically deflectable mirror plates
- Patent Title (中): 具有静电偏转镜面板的微镜阵列器件
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Application No.: US11110184Application Date: 2005-04-19
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Publication No.: US07394140B2Publication Date: 2008-07-01
- Inventor: Satyadev Patel , Andrew Huibers , Chris Spindt , Peter H Heureux
- Applicant: Satyadev Patel , Andrew Huibers , Chris Spindt , Peter H Heureux
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent W. James Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; G02B26/00
Abstract:
Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.
Public/Granted literature
- US20050196896A1 Micromirror array device Public/Granted day:2005-09-08
Information query
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