发明授权
US07402865B2 Semiconductor device including a contact connected to the body and method of manufacturing the same 有权
包括连接到身体的接触件的半导体器件及其制造方法

Semiconductor device including a contact connected to the body and method of manufacturing the same
摘要:
A Schottky junction is formed at the connection between an SOI layer and a contact (namely, under an element isolation insulating film) without forming a P+ region with a high impurity concentration thereat. The surface of a body contact is provide with a barrier metal. A silicide is formed between the body contact and the SOI layer as a result of the reaction of the barrier metal and the SOI layer.
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