发明授权
- 专利标题: Method and apparatus for measuring thickness of thin article
- 专利标题(中): 用于测量薄制品厚度的方法和装置
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申请号: US11283294申请日: 2005-11-18
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公开(公告)号: US07403288B2公开(公告)日: 2008-07-22
- 发明人: Jhy-Chain Lin
- 申请人: Jhy-Chain Lin
- 申请人地址: TW Tu-Cheng, Taipei Hsien
- 专利权人: Hon Hai Precision Industry Co., Ltd.
- 当前专利权人: Hon Hai Precision Industry Co., Ltd.
- 当前专利权人地址: TW Tu-Cheng, Taipei Hsien
- 优先权: TW93139379A 20041217
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B9/02
摘要:
An apparatus (100) for measuring a thickness of a thin article according to an embodiment of the present apparatus is provided. The apparatus includes an optical fiber interferometer (101), a signal processor module (102) and a measuring module (103). The optical fiber interferometer is configured for obtaining an optical distance difference. This optical distance difference is a result of the thickness of the thin article between a first optical path in which the thin article is measured and a second optical path. The signal processor module is configured for converting an optical distance difference into a phase difference and processing the optical distance difference to obtain a linear signal. That linear signal is convertible into a thickness value of the thin article.
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