发明授权
US07410552B2 Electron cyclotron resonance equipment with variable flare angle of horn antenna
失效
具有喇叭天线可变喇叭角的电子回旋共振设备
- 专利标题: Electron cyclotron resonance equipment with variable flare angle of horn antenna
- 专利标题(中): 具有喇叭天线可变喇叭角的电子回旋共振设备
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申请号: US11007878申请日: 2004-12-09
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公开(公告)号: US07410552B2公开(公告)日: 2008-08-12
- 发明人: Ji-Hyun Hur , Jai-Kwang Shin , Jae-Joon Oh
- 申请人: Ji-Hyun Hur , Jai-Kwang Shin , Jae-Joon Oh
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd
- 当前专利权人: Samsung Electronics Co., Ltd
- 当前专利权人地址: KR
- 代理机构: The Farrell Law Firm, PC
- 优先权: KR10-2003-0089738 20031210
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23F1/00 ; H01L21/306
摘要:
An electron cyclotron resonance equipment generates plasma by application of a processing gas and microwave energy into a vacuum chamber having a wafer therein in an environment of reduced pressure. The equipment includes a horn antenna assembly mounted onto an uppermost end of the vacuum chamber for radiating the microwave energy supplied from a high-frequency generator into the vacuum chamber. The horn antenna enables extension and retraction in a lengthwise direction to change a flare angle of the horn antenna. The equipment is provided with a fixed antenna and a plurality of mobile antennas to configure a horn antenna assembly, thereby enabling control of the flare angle in the horn antenna as a result of displacement of the mobile antennas. Thus, the uniformity in radiation of the microwave energy within plasma chamber can be controlled with efficiency.