发明授权
- 专利标题: LDMOS device with improved ESD performance
- 专利标题(中): LDMOS器件具有改进的ESD性能
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申请号: US11337147申请日: 2006-01-20
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公开(公告)号: US07420252B2公开(公告)日: 2008-09-02
- 发明人: Kuo-Ming Wu , Jian-Hsing Lee , Yi-Chun Lin , Chi-Chih Chen
- 申请人: Kuo-Ming Wu , Jian-Hsing Lee , Yi-Chun Lin , Chi-Chih Chen
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: K & L Gates LLP
- 主分类号: H01L23/62
- IPC分类号: H01L23/62
摘要:
A semiconductor device includes a first doped region disposed on a first well in a semiconductor substrate; a second doped region disposed on a second well adjacent to the first well in the semiconductor substrate, the second doped region having a dopant density higher than that of the second well; and a gate structure overlying parts of the first and second wells for controlling a current flowing between the first and second doped regions. A first spacing distance from an interface between the second doped region and the second well to its closest edge of the gate structure is greater than 200 percent of a second spacing distance from a center point of second doped region to the edge of the gate structure, thereby increasing impedance against an electrostatic discharge (ESD) current flowing between the first and second doped regions during an ESD event.
公开/授权文献
- US20070170469A1 LDMOS device with improved ESD performance 公开/授权日:2007-07-26
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