发明授权
US07422654B2 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
失效
用于在磁场增强等离子体反应器中成形磁场的方法和装置
- 专利标题： Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
- 专利标题（中）： 用于在磁场增强等离子体反应器中成形磁场的方法和装置
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申请号： US10778933申请日： 2004-02-13
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公开(公告)号： US07422654B2公开(公告)日： 2008-09-09
- 发明人: Roger Alan Lindley , Jingbao Liu , Bryan Y. Pu , Keiji Horioka
- 申请人： Roger Alan Lindley , Jingbao Liu , Bryan Y. Pu , Keiji Horioka
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Moser IP Law Group
- 主分类号： C23F1/00
- IPC分类号： C23F1/00 ; H01L21/306 ; C23C16/00
摘要：
A magnetic field generator which provides greater control over the magnetic field is provided. The magnetic field generator has a plurality of overlapping main magnetic coil sections for forming a magnetic field generally parallel to the top surface of the supporting member. In other embodiments, sub-magnetic coil sections are placed symmetrically around the main magnetic coil sections.