Invention Grant
US07422929B2 Wafer-level packaging of optoelectronic devices 有权
晶圆级封装的光电器件

Wafer-level packaging of optoelectronic devices
Abstract:
In an embodiment, the invention provides a method for forming a wafer-level package. A bonding pad is formed on a first wafer. After forming the bonding pad, an optoelectronic device is located on the first wafer. A gasket is formed on a second wafer. After a gasket is formed on a second wafer, the second wafer is attached to the first wafer with a bond between the gasket and the bonding pad.
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