发明授权
US07437911B2 Method and system for operating an air gauge at programmable or constant standoff
有权
用于在可编程或恒定间距下操作气压计的方法和系统
- 专利标题： Method and system for operating an air gauge at programmable or constant standoff
- 专利标题（中）： 用于在可编程或恒定间距下操作气压计的方法和系统
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申请号： US11011435申请日： 2004-12-15
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公开(公告)号： US07437911B2公开(公告)日： 2008-10-21
- 发明人: Daniel N. Galburt , Boguslaw F. Gajdeczko
- 申请人： Daniel N. Galburt , Boguslaw F. Gajdeczko
- 申请人地址： NL Veldhoven
- 专利权人： ASML Holding N.V.
- 当前专利权人： ASML Holding N.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Sterne, Kessler, Goldstein & Fox P.L.L.C
- 主分类号： G01B13/08
- IPC分类号： G01B13/08 ; G01M3/02
摘要：
Provided are a method and system for measuring a distance to an object. The system includes an air gauge configured to sense a distance to a surface of the object and a sensor configured to measure at least one from the group including (i) a relative position of the air gauge and (ii) a relative position of the surface of the object. Outputs of the air gauge and the sensor are combined to produce a combined air gauge reading.
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