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1.发明授权Method and system for operating an air gauge at programmable or constant standoff 有权用于在可编程或恒定间距下操作气压计的方法和系统公开(公告)号：US07797985B2
公开(公告)日：2010-09-21
申请号：US12209487
申请日：2008-09-12
IPC分类号： G01B13/08
CPC分类号： G03F7/70775 , G01B13/02 , G03F9/7023 , G03F9/7057 , G03F9/7088
摘要： Provided are a methods and systems for determining a topography of an object. In an embodiment, a system includes a reference probe configured to measure a surface of a reference surface and to generate a reference signal, a measuring probe configured to measure a surface of an object and to generate a measurement signal, a sensor configured to sense a position of the measuring probe and to generate a sensor signal, and a combiner configured to receive the sensor signal and the measurement signal and to generate a combination signal therefrom. A desired distance between the measuring probe and the object is substantially maintained by adjusting the position of the measuring probe based on the measurement signal. A topography of the object is determined based at least on a comparison of the reference signal and the combination signal.
摘要翻译： 提供了一种用于确定对象的形貌的方法和系统。 在一个实施例中，系统包括被配置为测量参考表面的表面并产生参考信号的参考探针，配置成测量物体的表面并产生测量信号的测量探针，被配置为感测 测量探针的位置并产生传感器信号，以及组合器，被配置为接收传感器信号和测量信号并从其产生组合信号。 通过基于测量信号调整测量探针的位置，基本上保持了测量探针和物体之间的期望距离。 至少基于参考信号和组合信号的比较来确定对象的地形。
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公开(公告)号：US07010958B2
公开(公告)日：2006-03-14
申请号：US10322768
申请日：2002-12-19
申请人： Boguslaw F. Gajdeczko , Kenneth M. Bogursky , Daniel N. Galburt , Willy M. Sander , Kevin J. Violette
发明人： Boguslaw F. Gajdeczko , Kenneth M. Bogursky , Daniel N. Galburt , Willy M. Sander , Kevin J. Violette
IPC分类号： G01B13/08
CPC分类号： G03F7/709 , G01B13/12 , G03F7/70341 , G03F7/7085 , G05D7/0186
摘要： An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor, and/or snubber made of porous material, and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
摘要翻译： 一种用于精确检测测量探头和表面之间非常小距离的装置和方法，更具体地涉及使用恒定气流并感测气动桥中的质量流量以检测非常小的距离的接近传感器。 在该装置内，使用由多孔材料制成的限流器和/或缓冲器和/或质量流量控制器使得能够在纳米至亚纳米范围内检测非常小的距离。 另一实施例，其中接近传感器的测量通道连接到多个测量分支。
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公开(公告)号：US07124624B2
公开(公告)日：2006-10-24
申请号：US11198278
申请日：2005-08-08
申请人： Boguslaw F. Gajdeczko , Kenneth M. Bogursky , Daniel N. Galburt , Willy M. Sander , Kevin J. Violette
发明人： Boguslaw F. Gajdeczko , Kenneth M. Bogursky , Daniel N. Galburt , Willy M. Sander , Kevin J. Violette
CPC分类号： G03F7/709 , G01B13/12 , G03F7/70341 , G03F7/7085 , G05D7/0186
摘要： An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
摘要翻译： 一种用于精确检测测量探头和表面之间非常小距离的装置和方法，更具体地涉及使用恒定气流并感测气动桥中的质量流量以检测非常小的距离的接近传感器。 在该装置内，使用由多孔材料制成的限流器和/或缓冲器和/或质量流量控制器使得能够在纳米至亚纳米范围内检测非常小的距离。 另一实施例，其中接近传感器的测量通道连接到多个测量分支。
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4.发明申请Method and System for Operating an Air Gauge at Programmable or Constant Standoff 有权在可编程或恒定间隔下操作气压计的方法和系统公开(公告)号：US20090000354A1
公开(公告)日：2009-01-01
申请号：US12209487
申请日：2008-09-12
IPC分类号： G01B13/08
CPC分类号： G03F7/70775 , G01B13/02 , G03F9/7023 , G03F9/7057 , G03F9/7088
摘要： Provided are a methods and systems for determining a topography of an object. In an embodiment, a system includes a reference probe configured to measure a surface of a reference surface and to generate a reference signal, a measuring probe configured to measure a surface of an object and to generate a measurement signal, a sensor configured to sense a position of the measuring probe and to generate a sensor signal, and a combiner configured to receive the sensor signal and the measurement signal and to generate a combination signal therefrom. A desired distance between the measuring probe and the object is substantially maintained by adjusting the position of the measuring probe based on the measurement signal. A topography of the object is determined based at least on a comparison of the reference signal and the combination signal.
摘要翻译： 提供了一种用于确定对象的形貌的方法和系统。 在一个实施例中，系统包括被配置为测量参考表面的表面并产生参考信号的参考探针，配置成测量物体的表面并产生测量信号的测量探针，被配置为感测 测量探针的位置并产生传感器信号，以及组合器，被配置为接收传感器信号和测量信号并从其产生组合信号。 通过基于测量信号调整测量探针的位置，基本上保持了测量探针和物体之间的期望距离。 至少基于参考信号和组合信号的比较来确定对象的地形。
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5.发明授权Method and system for operating an air gauge at programmable or constant standoff 有权用于在可编程或恒定间距下操作气压计的方法和系统公开(公告)号：US07437911B2
公开(公告)日：2008-10-21
申请号：US11011435
申请日：2004-12-15
CPC分类号： G03F7/70775 , G01B13/02 , G03F9/7023 , G03F9/7057 , G03F9/7088
摘要： Provided are a method and system for measuring a distance to an object. The system includes an air gauge configured to sense a distance to a surface of the object and a sensor configured to measure at least one from the group including (i) a relative position of the air gauge and (ii) a relative position of the surface of the object. Outputs of the air gauge and the sensor are combined to produce a combined air gauge reading.
摘要翻译： 提供了一种用于测量到物体的距离的方法和系统。 该系统包括配置成感测到物体的表面的距离的空气计和被配置为测量来自该组中的至少一个的传感器，该传感器包括（i）空气计的相对位置和（ii）表面的相对位置 的对象。 气压表和传感器的输出相结合，产生一个组合的气压表读数。
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