发明授权
- 专利标题: Method of classifying defects
- 专利标题(中): 分类缺陷的方法
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申请号: US11421019申请日: 2006-05-30
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公开(公告)号: US07446865B2公开(公告)日: 2008-11-04
- 发明人: Ki-Suk Chung , Chung-Sam Jun , Yu-Sin Yang , Byung-Sug Lee , Ji-Young Shin , Tae-Sung Kim
- 申请人: Ki-Suk Chung , Chung-Sam Jun , Yu-Sin Yang , Byung-Sug Lee , Ji-Young Shin , Tae-Sung Kim
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Marger Johnson & McCollom, P.C.
- 优先权: KR10-2005-0046484 20050531
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A method of classifying defects of an object includes irradiating multi-wavelength light onto the object, splitting light reflected from the object into light beams, each of the light beams having different wavelengths, obtaining image information of the object based on each of the light beams, forming a characteristic matrix that represent the wavelengths and the image information, and analyzing the characteristic matrix to determine types of the defects on the object. Thus, the defects may be accurately classified using a difference between reactivity of each of the defects in accordance with variations of the wavelengths and inspection conditions.
公开/授权文献
- US20070041609A1 METHOD OF CLASSIFYING DEFECTS 公开/授权日:2007-02-22