Invention Grant
- Patent Title: Interferometer for determining characteristics of an object surface
- Patent Title (中): 用于确定物体表面特征的干涉仪
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Application No.: US11335873Application Date: 2006-01-19
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Publication No.: US07446882B2Publication Date: 2008-11-04
- Inventor: Xavier Colonna De Lega , Peter De Groot
- Applicant: Xavier Colonna De Lega , Peter De Groot
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
Disclosed is a system including: (i) an interferometer configured to direct test electromagnetic radiation to a test surface and reference electromagnetic radiation to a reference surface and subsequently combine the electromagnetic radiation to form an interference pattern, the electromagnetic radiation being derived from a common source; (ii) a multi-element detector; and (iii) one or more optics configured to image the interference pattern onto the detector so that different elements of the detector correspond to different illumination angles of the test surface by the test electromagnetic radiation.
Public/Granted literature
- US20060158659A1 Interferometer for determining characteristics of an object surface Public/Granted day:2006-07-20
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