Invention Grant
US07446882B2 Interferometer for determining characteristics of an object surface 有权
用于确定物体表面特征的干涉仪

Interferometer for determining characteristics of an object surface
Abstract:
Disclosed is a system including: (i) an interferometer configured to direct test electromagnetic radiation to a test surface and reference electromagnetic radiation to a reference surface and subsequently combine the electromagnetic radiation to form an interference pattern, the electromagnetic radiation being derived from a common source; (ii) a multi-element detector; and (iii) one or more optics configured to image the interference pattern onto the detector so that different elements of the detector correspond to different illumination angles of the test surface by the test electromagnetic radiation.
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