发明授权
US07452568B2 Centrifugal method for filing high aspect ratio blind micro vias with powdered materials for circuit formation 有权
离心方法,用于提供具有电路形成的粉末材料的高纵横比盲孔

Centrifugal method for filing high aspect ratio blind micro vias with powdered materials for circuit formation
摘要:
The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches with powders, pastes, suspensions of materials to act as any of a conducting, structural support, or protective member of an electronic component.
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