发明授权
- 专利标题: Gallium nitride-based semiconductor device
- 专利标题(中): 氮化镓基半导体器件
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申请号: US10591585申请日: 2005-03-03
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公开(公告)号: US07453091B2公开(公告)日: 2008-11-18
- 发明人: Masato Kobayakawa , Hideki Tomozawa , Hisayuki Miki
- 申请人: Masato Kobayakawa , Hideki Tomozawa , Hisayuki Miki
- 申请人地址: JP Tokyo
- 专利权人: Showa Denko K.K.
- 当前专利权人: Showa Denko K.K.
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2004-060495 20040304
- 国际申请: PCT/JP2005/004140 WO 20050303
- 国际公布: WO2005/086242 WO 20050915
- 主分类号: H01L29/26
- IPC分类号: H01L29/26
摘要:
A gallium nitride-based semiconductor device has a p-type layer that is a gallium nitride compound semiconductor layer containing a p-type impurity and exhibiting p-type conduction. The p-type layer includes a top portion and an inner portion located under the top portion. The inner portion contains the p-type impurity element and, in combination therewith, hydrogen.
公开/授权文献
- US20070187693A1 Gallium nitride-based semiconductor device 公开/授权日:2007-08-16
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