Invention Grant
- Patent Title: Projection display system including a high fill ratio silicon spatial light modulator
- Patent Title (中): 投影显示系统包括高填充率硅空间光调制器
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Application No.: US11448537Application Date: 2006-06-05
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Publication No.: US07453624B2Publication Date: 2008-11-18
- Inventor: Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
- Applicant: Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
- Applicant Address: US CA Sunnyvale
- Assignee: Miradia Inc.
- Current Assignee: Miradia Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
Public/Granted literature
- US20070097486A1 Projection display system including a high fill ratio silicon spatial light modulator Public/Granted day:2007-05-03
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