发明授权
- 专利标题: Adjustment arrangement of an optical element
- 专利标题(中): 光学元件的调整布置
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申请号: US11533660申请日: 2006-09-20
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公开(公告)号: US07457059B2公开(公告)日: 2008-11-25
- 发明人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
- 申请人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE10140608 20010818
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
公开/授权文献
- US20070014038A1 ADJUSTMENT ARRANGEMENT OF AN OPTICAL ELEMENT 公开/授权日:2007-01-18
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |