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公开(公告)号:US07457059B2
公开(公告)日:2008-11-25
申请号:US11533660
申请日:2006-09-20
申请人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
发明人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
IPC分类号: G02B7/02
CPC分类号: G03F7/70258 , G02B7/023 , G03F7/70825
摘要: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
摘要翻译: 一种布置用于调整光学元件(1),特别是光学系统中的透镜的调整,特别是用于半导体光刻的投影透镜系统中。 光学元件(1)通过分布在光学元件(1)的圆周上的多个轴承脚(2)安装在安装件(3)中,并且可由致动器(5)选择性地变形。 至少一些轴承脚(2)在相应的轴承座(2)的区域中被致动器(5)接合,使得相应的轴承座(2)可以沿着光学方向 轴(7)。
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公开(公告)号:US20090009892A1
公开(公告)日:2009-01-08
申请号:US12211978
申请日:2008-09-17
申请人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
发明人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
IPC分类号: G02B7/04
CPC分类号: G03F7/70258 , G02B7/023 , G03F7/70825
摘要: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
摘要翻译: 一种布置用于调整光学元件(1),特别是光学系统中的透镜的调整,特别是用于半导体光刻的投影透镜系统中。 光学元件(1)通过分布在光学元件(1)的圆周上的多个轴承脚(2)安装在安装件(3)中,并且可由致动器(5)选择性地变形。 至少一些轴承脚(2)在相应的轴承座(2)的区域中被致动器(5)接合,使得相应的轴承座(2)可以沿着光学方向 轴(7)。
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公开(公告)号:US07656595B2
公开(公告)日:2010-02-02
申请号:US12211978
申请日:2008-09-17
申请人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
发明人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
IPC分类号: G02B7/02
CPC分类号: G03F7/70258 , G02B7/023 , G03F7/70825
摘要: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
摘要翻译: 一种布置用于调整光学元件(1),特别是调整光学系统中的透镜,特别是在用于半导体光刻的投影透镜系统中。 光学元件(1)通过分布在光学元件(1)的圆周上的多个轴承脚(2)安装在安装件(3)中,并且可由致动器(5)选择性地变形。 至少一些轴承脚(2)在相应的轴承座(2)的区域中被致动器(5)接合,使得相应的轴承座(2)可以沿着光学方向 轴(7)。
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公开(公告)号:US07193794B2
公开(公告)日:2007-03-20
申请号:US10779392
申请日:2004-02-13
申请人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
发明人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
IPC分类号: G02B7/02
CPC分类号: G03F7/70258 , G02B7/023 , G03F7/70825
摘要: An arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
摘要翻译: 一种布置用于调整光学元件(1),特别是调整光学系统中的透镜,特别是在用于半导体光刻的投影透镜系统中。 光学元件(1)通过分布在光学元件(1)的圆周上的多个轴承脚(2)安装在安装件(3)中,并且可由致动器(5)选择性地变形。 至少一些轴承脚(2)在相应的轴承座(2)的区域中被致动器(5)接合,使得相应的轴承座(2)可以沿着光学方向 轴(7)。
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公开(公告)号:US20070014038A1
公开(公告)日:2007-01-18
申请号:US11533660
申请日:2006-09-20
申请人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
发明人: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
IPC分类号: G02B7/02
CPC分类号: G03F7/70258 , G02B7/023 , G03F7/70825
摘要: A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
摘要翻译: 一种布置用于调整光学元件(1),特别是光学系统中的透镜的调整,特别是用于半导体光刻的投影透镜系统中。 光学元件(1)通过分布在光学元件(1)的圆周上的多个轴承脚(2)安装在安装件(3)中,并且可由致动器(5)选择性地变形。 至少一些轴承脚(2)在相应的轴承座(2)的区域中被致动器(5)接合,使得相应的轴承座(2)可以沿着光学方向 轴(7)。
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