Invention Grant
US07465362B2 Plasma-assisted nitrogen surface-treatment 失效
等离子辅助氮表面处理

Plasma-assisted nitrogen surface-treatment
Abstract:
Methods and systems (10) for plasma-assisted nitrogen surface-treatments are provided. The method can include subjecting a gas (24) to electromagnetic radiation (26) in the presence of a plasma catalyst (100, 120, 140) to initiate a plasma containing nitrogen. The surface region of an object can be exposed to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the surface region.
Public/Granted literature
Information query
Patent Agency Ranking
0/0