Invention Grant
- Patent Title: Plasma-assisted nitrogen surface-treatment
- Patent Title (中): 等离子辅助氮表面处理
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Application No.: US10513607Application Date: 2003-05-07
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Publication No.: US07465362B2Publication Date: 2008-12-16
- Inventor: Devendra Kumar , Satyendra Kumar
- Applicant: Devendra Kumar , Satyendra Kumar
- Applicant Address: US MA N. Billerica
- Assignee: BTU International, Inc.
- Current Assignee: BTU International, Inc.
- Current Assignee Address: US MA N. Billerica
- Agency: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- International Application: PCT/US03/14036 WO 20030507
- International Announcement: WO03/096380 WO 20031120
- Main IPC: C23C8/36
- IPC: C23C8/36

Abstract:
Methods and systems (10) for plasma-assisted nitrogen surface-treatments are provided. The method can include subjecting a gas (24) to electromagnetic radiation (26) in the presence of a plasma catalyst (100, 120, 140) to initiate a plasma containing nitrogen. The surface region of an object can be exposed to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the surface region.
Public/Granted literature
- US20060162818A1 Plasma-assisted nitrogen surface-treatment Public/Granted day:2006-07-27
Information query
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