发明授权
- 专利标题: Broad band objective having improved lateral color performance
- 专利标题(中): 具有改进的侧面颜色性能的宽带物镜
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申请号: US11825405申请日: 2007-07-05
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公开(公告)号: US07474461B2公开(公告)日: 2009-01-06
- 发明人: Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
- 申请人: Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
- 申请人地址: US CA Milpitas
- 专利权人: KLA - Tencor Technologies Corporation
- 当前专利权人: KLA - Tencor Technologies Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Smyrski Law Group, A P.C.
- 主分类号: G02B3/00
- IPC分类号: G02B3/00
摘要:
A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.
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