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1.发明授权公开(公告)号：US07518789B2
公开(公告)日：2009-04-14
申请号：US10959022
申请日：2004-10-04
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译： 提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。 该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。 在许多情况下，所使用的透镜可以使用单一材料来制造或制造。 公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。 系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。 所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。
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公开(公告)号：US07245438B2
公开(公告)日：2007-07-17
申请号：US11245591
申请日：2005-10-05
IPC分类号： G02B3/00
CPC分类号： G02B27/0025 , G01N21/8806 , G02B21/02
摘要： A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.
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3.发明授权公开(公告)号：US06512631B2
公开(公告)日：2003-01-28
申请号：US09349036
申请日：1999-07-07
IPC分类号： G02B1314
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译： 提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。 该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。 在许多情况下，所使用的透镜可以使用单一材料来制造或制造。 公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。 系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。 所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。
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公开(公告)号：US07869121B2
公开(公告)日：2011-01-11
申请号：US11375316
申请日：2006-03-13
IPC分类号： G02B5/08
CPC分类号： G02B21/04 , G02B17/0856
摘要： A relatively high NA objective employed for use in imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. One or more elements may employ an aspheric surface. The objective may provide an uncorrected spectral bandwidth up to approximately 193 to 266 nanometers and numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may include more than one lens and may be formed of a material different from at least one other lens in the objective.
摘要翻译： 提供了用于成像试样的相对较高的NA目标。 该目的包括具有至少一个聚焦透镜的透镜组，该至少一个聚焦透镜被配置为接收光能并形成中间图像，定向成接收中间图像并提供中间光能的至少一个场透镜，以及定位成接收中间图像的中间图像 光能并向样品施加光能。 一个或多个元件可以采用非球面。 该目的可以提供高达约193至266纳米的未校正的光谱带宽和超过0.9的数值孔径。 元素的直径小于100毫米，并且可以适合标准显微镜。 场透镜可以包括多于一个透镜，并且可以由与物镜中的至少一个其它透镜不同的材料形成。
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公开(公告)号：US07639419B2
公开(公告)日：2009-12-29
申请号：US10615512
申请日：2003-07-07
IPC分类号： G02B17/08
CPC分类号： G01N21/8806 , G01N21/9501 , G02B5/001 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341
摘要： A system for use with a reduced size catadioptric objective is disclosed. The system including the reduced size objective includes various subsystems to allow enhanced imaging, the subsystems including illumination, imaging, autofocus, positioning, sensor, data acquisition, and data analysis. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and elements of the objective are less than 100 mm in diameter. The objective comprises a focusing lens group and at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement. The design imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90 to a specimen for imaging purposes, and the design may be employed in various environments.
摘要翻译： 公开了一种用于减小尺寸反射折射率物镜的系统。 包括缩小尺寸物镜的系统包括允许增强成像的各种子系统，子系统包括照明，成像，自动对焦，定位，传感器，数据采集和数据分析。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且物镜的元件的直径小于100mm。 该目的包括聚焦透镜组和至少一个定位成从聚焦透镜组接收聚焦光能并提供中间光能的场透镜。 目的还包括一个Mangin镜面布置。 该设计为成像目的赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可用于各种环境中。
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公开(公告)号：US07180658B2
公开(公告)日：2007-02-20
申请号：US10434374
申请日：2003-05-07
IPC分类号： G02B17/08
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy and comprising at least one focusing lens. The objective further comprises at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译： 公开了一种减小尺寸的反射折射物镜和系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。 元件的直径小于100毫米。 该目的包括被配置为接收光能并且包括至少一个聚焦透镜的聚焦透镜组。 该目的还包括至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜。 该目的还包括Mangin镜布置，其定位成从场透镜接收中间光能并形成受控的光能以传输到样本。 芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。
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7.发明授权公开(公告)号：US06801358B2
公开(公告)日：2004-10-05
申请号：US10352638
申请日：2003-01-27
IPC分类号： G02B1314
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译： 提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。 该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。 在许多情况下，所使用的透镜可以使用单一材料来制造或制造。 公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。 系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。 所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。
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公开(公告)号：US07679842B2
公开(公告)日：2010-03-16
申请号：US11543519
申请日：2006-10-04
IPC分类号： G02B9/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译： 公开了一种减小尺寸的反射折射物镜和系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。 元件的直径小于100毫米。 该目的包括被配置为接收光能的聚焦透镜组，至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜，以及设置成接收来自光源的中间光能 并且形成用于传输到样本的受控光能。 芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。
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9.发明授权Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权使用浸没液的反射折射成像系统用于宽带显微镜公开(公告)号：US07633675B2
公开(公告)日：2009-12-15
申请号：US11999558
申请日：2007-12-05
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译： 公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。 元素的直径小于100毫米，并且可以适合标准显微镜。 该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。 还公开了用于反射折射检查系统中的目的的可变焦距光学系统。
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10.发明申请Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权使用浸没液的反射折射成像系统用于宽带显微镜公开(公告)号：US20080247035A1
公开(公告)日：2008-10-09
申请号：US11999558
申请日：2007-12-05
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译： 公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。 元素的直径小于100毫米，并且可以适合标准显微镜。 该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。 还公开了用于反射折射检查系统中的目的的可变焦距光学系统。
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