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US07474469B2 Arrangement of optical elements in a microlithographic projection exposure apparatus 失效
微光刻投影曝光装置中的光学元件的布置

Arrangement of optical elements in a microlithographic projection exposure apparatus
摘要:
The invention relates to an arrangement of optical elements in a microlithographic projection exposure apparatus, particularly in a projection objective of a microlithographic projection exposure apparatus. The arrangement comprises a rigid first optical element, a rigid second optical element with a first optical surface and a second optical surface on opposite sides and a first liquid. The first optical element has a concave optical surface. The first side of the second optical element is facing the concave optical surface of the first optical element. The first liquid is at least partially filling the space between the first optical element and the second optical element.
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