Invention Grant
US07479234B2 Method for producing cavities having optically transparent wall 有权
用于制造具有光学透明壁的空腔的方法

Method for producing cavities having optically transparent wall
Abstract:
A method is proposed which will enable cavities having optically transparent walls to be produced simply and cost-effectively in a component by using standard methods of microsystems technology. For this purpose, a silicon region is first produced, which is surrounded on all sides by at least one optically transparent cladding layer. At least one opening is then produced in the cladding layer. Over this opening, the silicon surrounded by the cladding layer is dissolved out, forming a cavity within the cladding layer. In this context, the cladding layer acts as an etch barrier layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0