Invention Grant
- Patent Title: Method for producing cavities having optically transparent wall
- Patent Title (中): 用于制造具有光学透明壁的空腔的方法
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Application No.: US10492009Application Date: 2002-09-04
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Publication No.: US07479234B2Publication Date: 2009-01-20
- Inventor: Hubert Benzel , Heribert Weber , Frank Schaefer
- Applicant: Hubert Benzel , Heribert Weber , Frank Schaefer
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE10149139 20011005
- International Application: PCT/DE02/03261 WO 20020904
- International Announcement: WO03/031318 WO 20030417
- Main IPC: H01B13/00
- IPC: H01B13/00

Abstract:
A method is proposed which will enable cavities having optically transparent walls to be produced simply and cost-effectively in a component by using standard methods of microsystems technology. For this purpose, a silicon region is first produced, which is surrounded on all sides by at least one optically transparent cladding layer. At least one opening is then produced in the cladding layer. Over this opening, the silicon surrounded by the cladding layer is dissolved out, forming a cavity within the cladding layer. In this context, the cladding layer acts as an etch barrier layer.
Public/Granted literature
- US20050016949A1 Method for producing cavities having optically transparent wall Public/Granted day:2005-01-27
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