发明授权
US07480322B2 Electrically-pumped (Ga,In,Al)N vertical-cavity surface-emitting laser 失效
电泵浦(Ga,In,Al)N垂直腔表面发射激光器

Electrically-pumped (Ga,In,Al)N vertical-cavity surface-emitting laser
摘要:
A vertical-cavity surface-emitting laser (VCSEL) comprising a low-loss thin metal contact and current spreading layer within the optical cavity that provides for improved ohmic contact and lateral current distribution, a substrate including a plano-concave optical cavity, a (Ga,In,Al)N multiple quantum well (MQW) active region contained within the optical cavity that generates light when injected by an electrical current, and an integrated micromirror fabricated onto the substrate that provides for optical mode control of the light generated by the active region. A relatively simple process is used to fabricate the VCSEL.
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