发明授权
- 专利标题： Piezoelectric thin-film resonator and filter
- 专利标题（中）： 压电薄膜谐振器和滤波器
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申请号： US11586731申请日： 2006-10-26
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公开(公告)号： US07482738B2公开(公告)日： 2009-01-27
- 发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
- 申请人： Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
- 申请人地址： JP Yokohama JP Kawasaki
- 专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址： JP Yokohama JP Kawasaki
- 代理机构： Arent Fox LLP
- 优先权： JP2005-312094 20051027
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.
公开/授权文献
- US20070096597A1 Piezoelectric thin-film resonator and filter 公开/授权日：2007-05-03
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