发明授权
US07485580B2 Method for removing organic electroluminescent residues from a substrate
有权
从底物中除去有机电致发光残留物的方法
- 专利标题: Method for removing organic electroluminescent residues from a substrate
- 专利标题(中): 从底物中除去有机电致发光残留物的方法
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申请号: US11518958申请日: 2006-09-12
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公开(公告)号: US07485580B2公开(公告)日: 2009-02-03
- 发明人: Andrew David Johnson , Peter James Maroulis , Mark Ian Sistern , Martin Jay Plishka , Steven Arthur Rogers , John Bartram Dickenson
- 申请人: Andrew David Johnson , Peter James Maroulis , Mark Ian Sistern , Martin Jay Plishka , Steven Arthur Rogers , John Bartram Dickenson
- 申请人地址: US PA Allentown
- 专利权人: Air Products and Chemicals, Inc.
- 当前专利权人: Air Products and Chemicals, Inc.
- 当前专利权人地址: US PA Allentown
- 代理商 Rosaleen Morris-Oskanian; Joseph D. Rossi
- 主分类号: H01L21/461
- IPC分类号: H01L21/461
摘要:
A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.