发明授权
US07491565B2 III-nitride light emitting devices fabricated by substrate removal 有权
通过衬底去除制造的III族氮化物发光器件

III-nitride light emitting devices fabricated by substrate removal
摘要:
Devices and techniques for fabricating InAlGaN light-emitting devices are described that result from the removal of light-emitting layers from the sapphire growth substrate. In several embodiments, techniques for fabricating a vertical InAlGaN light-emitting diode structure that result in improved performance and or cost-effectiveness are described. Furthermore, metal bonding, substrate liftoff, and a novel RIE device separation technique are employed to efficiently produce vertical GaN LEDs on a substrate chosen for its thermal conductivity and ease of fabrication.
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