发明授权
US07491565B2 III-nitride light emitting devices fabricated by substrate removal
有权
通过衬底去除制造的III族氮化物发光器件
- 专利标题: III-nitride light emitting devices fabricated by substrate removal
- 专利标题(中): 通过衬底去除制造的III族氮化物发光器件
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申请号: US11330209申请日: 2006-01-10
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公开(公告)号: US07491565B2公开(公告)日: 2009-02-17
- 发明人: Carrie Carter Coman , Fred A. Kish, Jr. , Michael R Krames , Paul S Martin
- 申请人: Carrie Carter Coman , Fred A. Kish, Jr. , Michael R Krames , Paul S Martin
- 申请人地址: US CA San Jose
- 专利权人: Philips Lumileds Lighting Company, LLC
- 当前专利权人: Philips Lumileds Lighting Company, LLC
- 当前专利权人地址: US CA San Jose
- 代理机构: Patent Law Group LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Devices and techniques for fabricating InAlGaN light-emitting devices are described that result from the removal of light-emitting layers from the sapphire growth substrate. In several embodiments, techniques for fabricating a vertical InAlGaN light-emitting diode structure that result in improved performance and or cost-effectiveness are described. Furthermore, metal bonding, substrate liftoff, and a novel RIE device separation technique are employed to efficiently produce vertical GaN LEDs on a substrate chosen for its thermal conductivity and ease of fabrication.
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