Invention Grant
US07491565B2 III-nitride light emitting devices fabricated by substrate removal
有权
通过衬底去除制造的III族氮化物发光器件
- Patent Title: III-nitride light emitting devices fabricated by substrate removal
- Patent Title (中): 通过衬底去除制造的III族氮化物发光器件
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Application No.: US11330209Application Date: 2006-01-10
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Publication No.: US07491565B2Publication Date: 2009-02-17
- Inventor: Carrie Carter Coman , Fred A. Kish, Jr. , Michael R Krames , Paul S Martin
- Applicant: Carrie Carter Coman , Fred A. Kish, Jr. , Michael R Krames , Paul S Martin
- Applicant Address: US CA San Jose
- Assignee: Philips Lumileds Lighting Company, LLC
- Current Assignee: Philips Lumileds Lighting Company, LLC
- Current Assignee Address: US CA San Jose
- Agency: Patent Law Group LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Devices and techniques for fabricating InAlGaN light-emitting devices are described that result from the removal of light-emitting layers from the sapphire growth substrate. In several embodiments, techniques for fabricating a vertical InAlGaN light-emitting diode structure that result in improved performance and or cost-effectiveness are described. Furthermore, metal bonding, substrate liftoff, and a novel RIE device separation technique are employed to efficiently produce vertical GaN LEDs on a substrate chosen for its thermal conductivity and ease of fabrication.
Public/Granted literature
- US20060121702A1 III-nitride light emitting devices fabricated by substrate removal Public/Granted day:2006-06-08
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