发明授权
- 专利标题: Image sensor cells
- 专利标题(中): 图像传感器单元
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申请号: US11619024申请日: 2007-01-02
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公开(公告)号: US07491992B2公开(公告)日: 2009-02-17
- 发明人: James W. Adkisson , John J. Ellis-Monaghan , Mark D. Jaffe , Richard J. Rassel , Jeffrey P. Gambino
- 申请人: James W. Adkisson , John J. Ellis-Monaghan , Mark D. Jaffe , Richard J. Rassel , Jeffrey P. Gambino
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 Anthony J. Canale
- 主分类号: H01L31/62
- IPC分类号: H01L31/62 ; H01L31/113
摘要:
A structure (and method for forming the same) for an image sensor cell. The method includes providing a semiconductor substrate. Then, a charge collection well is formed in the semiconductor substrate, the charge collection well comprising dopants of a first doping polarity. Next, a surface pinning layer is formed in the charge collection well, the surface pinning layer comprising dopants of a second doping polarity opposite to the first doping polarity. Then, an electrically conductive push electrode is formed in direct physical contact with the surface pinning layer but not in direct physical contact with the charge collection well. Then, a transfer transistor is formed on the semiconductor substrate. The transfer transistor includes first and second source/drain regions and a channel region. The first and second source/drain regions comprise dopants of the first doping polarity. The first source/drain region is in direct physical contact with the charge collection well.
公开/授权文献
- US20070108485A1 IMAGE SENSOR CELLS 公开/授权日:2007-05-17
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