Invention Grant
- Patent Title: Image sensor cells
- Patent Title (中): 图像传感器单元
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Application No.: US11619024Application Date: 2007-01-02
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Publication No.: US07491992B2Publication Date: 2009-02-17
- Inventor: James W. Adkisson , John J. Ellis-Monaghan , Mark D. Jaffe , Richard J. Rassel , Jeffrey P. Gambino
- Applicant: James W. Adkisson , John J. Ellis-Monaghan , Mark D. Jaffe , Richard J. Rassel , Jeffrey P. Gambino
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Anthony J. Canale
- Main IPC: H01L31/62
- IPC: H01L31/62 ; H01L31/113

Abstract:
A structure (and method for forming the same) for an image sensor cell. The method includes providing a semiconductor substrate. Then, a charge collection well is formed in the semiconductor substrate, the charge collection well comprising dopants of a first doping polarity. Next, a surface pinning layer is formed in the charge collection well, the surface pinning layer comprising dopants of a second doping polarity opposite to the first doping polarity. Then, an electrically conductive push electrode is formed in direct physical contact with the surface pinning layer but not in direct physical contact with the charge collection well. Then, a transfer transistor is formed on the semiconductor substrate. The transfer transistor includes first and second source/drain regions and a channel region. The first and second source/drain regions comprise dopants of the first doping polarity. The first source/drain region is in direct physical contact with the charge collection well.
Public/Granted literature
- US20070108485A1 IMAGE SENSOR CELLS Public/Granted day:2007-05-17
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