Invention Grant
- Patent Title: Inspection systems and methods
- Patent Title (中): 检验系统和方法
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Application No.: US11086473Application Date: 2005-03-22
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Publication No.: US07492449B2Publication Date: 2009-02-17
- Inventor: Ifeanyi Charles Ume , Lizheng Zhang
- Applicant: Ifeanyi Charles Ume , Lizheng Zhang
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Thomas, Kayden, Horstemeyer & Risley, LLP
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
Embodiments of inspection systems and methods are disclosed. One embodiment of an inspection system, among others, comprises logic configured to receive a reference signal and a target signal, the reference signal having first surface displacement information and the target signal having second surface displacement information, said logic configured to determine a correlation coefficient between the first surface displacement information and the second surface displacement information, the correlation coefficient indicating whether an inspected object exhibits a defect.
Public/Granted literature
- US20050225754A1 Inspection systems and methods Public/Granted day:2005-10-13
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