Invention Grant
US07498592B2 Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams
有权
非双极射频等离子体电子源以及用于产生电子束的系统和方法
- Patent Title: Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams
- Patent Title (中): 非双极射频等离子体电子源以及用于产生电子束的系统和方法
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Application No.: US11427273Application Date: 2006-06-28
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Publication No.: US07498592B2Publication Date: 2009-03-03
- Inventor: Noah Hershkowitz , Benjamin Longmier , Scott Baalrud
- Applicant: Noah Hershkowitz , Benjamin Longmier , Scott Baalrud
- Applicant Address: US WI Madison
- Assignee: Wisconsin Alumni Research Foundation
- Current Assignee: Wisconsin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Lathrop & Clark LLP
- Main IPC: H01J37/077
- IPC: H01J37/077 ; H01J61/52 ; H01J7/24 ; H05B31/26

Abstract:
An electron generating device extracts electrons, through an electron sheath, from plasma produced using RF fields. The electron sheath is located near a grounded ring at one end of a negatively biased conducting surface, which is normally a cylinder. Extracted electrons pass through the grounded ring in the presence of a steady state axial magnetic field. Sufficiently large magnetic fields and/or RF power into the plasma allow for helicon plasma generation. The ion loss area is sufficiently large compared to the electron loss area to allow for total non-ambipolar extraction of all electrons leaving the plasma. Voids in the negatively-biased conducting surface allow the time-varying magnetic fields provided by the antenna to inductively couple to the plasma within the conducting surface. The conducting surface acts as a Faraday shield, which reduces any time-varying electric fields from entering the conductive surface, i.e. blocks capacitive coupling between the antenna and the plasma.
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