发明授权
- 专利标题: Methods and apparatus for rotationally accessed tester interface
- 专利标题(中): 用于旋转访问的测试仪接口的方法和装置
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申请号: US11880093申请日: 2007-07-18
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公开(公告)号: US07498800B1公开(公告)日: 2009-03-03
- 发明人: Kenneth S. Whiteman
- 申请人: Kenneth S. Whiteman
- 专利权人: Advanced Inquiry Systems, Inc.
- 当前专利权人: Advanced Inquiry Systems, Inc.
- 代理商 Raymond J. Werner
- 主分类号: G01R31/28
- IPC分类号: G01R31/28
摘要:
A wafer/wafer translator pair in the attached state, with the wafer translator extending beyond the outer circumference of the wafer, is disposed on a rotation stage. At least one surface of the edge-extended wafer translator, in a peripheral annular region, provides contact pads electrically coupled to corresponding pads on the wafer, and a caliper-style contact block, operable to move perpendicularly the edge-extended wafer translator is positioned such the contact pads of the annular region may be electrically engaged with the contact block. After electrical communication between the wafer and the contact block, the contact block moves to a disengagement position, the rotation stage rotates the wafer/wafer translator pair to a new position and the contact block may then move into engagement with different contact pads in the annular region.
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