Invention Grant
- Patent Title: Method of micro-fabrication of a helical slow wave structure using photo-resist processes
- Patent Title (中): 使用光刻胶工艺的螺旋慢波结构的微加工方法
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Application No.: US10941237Application Date: 2004-09-15
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Publication No.: US07504039B2Publication Date: 2009-03-17
- Inventor: Laurence P. Sadwick , Jehn-Huar Chern , Ruey-Jen Hwu , Jishi Ren , Ding Wu , Ching-Hsi Lin
- Applicant: Laurence P. Sadwick , Jehn-Huar Chern , Ruey-Jen Hwu , Jishi Ren , Ding Wu , Ching-Hsi Lin
- Applicant Address: US UT Salt Lake City
- Assignee: Innosys, Inc.
- Current Assignee: Innosys, Inc.
- Current Assignee Address: US UT Salt Lake City
- Main IPC: B44C1/22
- IPC: B44C1/22
Abstract:
Embodiments of the present invention include helical, ring bar and tunnel ladder slow wave structures (SWSs). Embodiments of methods of micro-fabricating such SWSs are also disclosed. Embodiments of high frequency electromagnetic devices including such SWSs are also disclosed. Exemplary high frequency electromagnetic devices may include a traveling wave tube, a traveling wave tube amplifier, a back wave oscillator, as part of a linear accelerator, a microwave power module, a klystron or a millimeter-wave power module.
Public/Granted literature
- US20060057504A1 Slow wave structures for microwave amplifiers and oscillators and methods of micro-fabrication Public/Granted day:2006-03-16
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