发明授权
US07505832B2 Method and apparatus for determining a substrate exchange position in a processing system
失效
用于确定处理系统中的基板交换位置的方法和装置
- 专利标题: Method and apparatus for determining a substrate exchange position in a processing system
- 专利标题(中): 用于确定处理系统中的基板交换位置的方法和装置
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申请号: US10802363申请日: 2004-03-16
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公开(公告)号: US07505832B2公开(公告)日: 2009-03-17
- 发明人: Dongchoon Suh , Akihiro Hosokawa , Hung The Nguyen
- 申请人: Dongchoon Suh , Akihiro Hosokawa , Hung The Nguyen
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan LLP
- 主分类号: G05B15/00
- IPC分类号: G05B15/00 ; G05B19/00
摘要:
Embodiments of a method and apparatus for determining a substrate exchange position in a processing system are provided. In one embodiment, a method of determining a substrate exchange position in a processing system includes determining an initial exchange position within a processing chamber, and resolving a change in the exchange position. The step of resolving may further include the step of sensing a change in temperature of a facet of a transfer chamber having the processing chamber coupled thereto, sensing a change in a state of the system, or sensing a change in position of the processing chamber, among others.
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