公开(公告)号：US07505832B2

公开(公告)日：2009-03-17

申请号：US10802363

申请日：2004-03-16

申请人： Dongchoon Suh ,  Akihiro Hosokawa ,  Hung The Nguyen

发明人： Dongchoon Suh ,  Akihiro Hosokawa ,  Hung The Nguyen

IPC分类号： G05B15/00 ,  G05B19/00

CPC分类号： H01L21/67259 ,  H01L21/67248 ,  H01L21/67745

摘要： Embodiments of a method and apparatus for determining a substrate exchange position in a processing system are provided. In one embodiment, a method of determining a substrate exchange position in a processing system includes determining an initial exchange position within a processing chamber, and resolving a change in the exchange position. The step of resolving may further include the step of sensing a change in temperature of a facet of a transfer chamber having the processing chamber coupled thereto, sensing a change in a state of the system, or sensing a change in position of the processing chamber, among others.

摘要翻译： 提供了一种用于确定处理系统中的基板交换位置的方法和装置的实施例。 在一个实施例中，确定处理系统中的基板交换位置的方法包括确定处理室内的初始交换位置，以及解决交换位置的变化。 分辨步骤可进一步包括检测具有与其耦合的处理室的传送室的面的温度变化的步骤，感测系统的状态的变化或感测处理室的位置的改变， 等等

公开(公告)号：US07007919B2

公开(公告)日：2006-03-07

申请号：US10418682

申请日：2003-04-17

申请人： Wendell Blonigan ,  Emanuel Beer ,  Dongchoon Suh ,  Jaime Munoz ,  Sam H. Kim

发明人： Wendell Blonigan ,  Emanuel Beer ,  Dongchoon Suh ,  Jaime Munoz ,  Sam H. Kim

IPC分类号： F16K3/16

CPC分类号： H01L21/67126 ,  F16K51/02

摘要： An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve isolates from each other. The slit valve door actuator assembly includes an actuator which moves the slit valve door between open and closed positions, and a locking mechanism to keep the slit valve door in a position to seal the slit valve in resistance to high gas pressure against the slit valve door. The locking mechanism may include a hard stop which is selectively movable into position to block retracting movement of the slit valve door.

摘要翻译： 用于狭缝阀门的致动器组件被配置为使狭缝阀保持在闭合状态，尽管狭缝阀彼此分离的相邻室之间具有高压差。 狭缝阀门致动器组件包括使狭缝阀门在打开和关闭位置之间移动的致动器，以及锁定机构，以将狭缝阀门保持在密封狭缝阀的位置，以抵抗狭缝阀门的高气压 。 锁定机构可以包括硬挡块，其可选择性地移动到位置以阻挡狭缝阀门的缩回运动。

公开(公告)号：US06916147B2

公开(公告)日：2005-07-12

申请号：US10280451

申请日：2002-10-25

申请人： Dongchoon Suh ,  Wendell T. Blonigan ,  Rolf A. Guenther

发明人： Dongchoon Suh ,  Wendell T. Blonigan ,  Rolf A. Guenther

IPC分类号： H01L21/673 ,  H01L21/677 ,  B65B21/02 ,  B65B69/00 ,  B65G65/04 ,  B65G65/34

CPC分类号： H01L21/6732 ,  H01L21/67772 ,  Y10S414/136

摘要： A substrate storage cassette and a method of orienting a substrate disposed therein are provided. In one embodiment, the substrate storage cassette includes a plurality of flanges pairs disposed between a first lateral sidewall coupled in a spaced-apart relation to a second lateral sidewall. Each of the flange pairs adapted to support a substrate thereon. At least a first alignment feature disposed between the flange pair and adapted to mate with an orientation feature of the substrate when the substrate is in a predefined orientation.

摘要翻译： 提供了基板存储盒和设置在其中的基板的定向方法。 在一个实施例中，衬底存储盒包括多个凸缘对，其设置在以与第二侧壁侧壁间隔开的关系连接的第一侧壁之间。 每个凸缘对适于在其上支撑基底。 至少第一对准特征设置在所述凸缘对之间并且当所述基板处于预定义取向时适于与所述基板的取向特征配合。