发明授权
US07507958B2 Conductive carbon nanotube tip, probe having the conductive carbon nanotube tip, and method of manufacturing the conductive carbon nanotube tip
有权
导电性碳纳米管尖端,具有导电性碳纳米管尖端的探针,以及导电性碳纳米管尖端的制造方法
- 专利标题: Conductive carbon nanotube tip, probe having the conductive carbon nanotube tip, and method of manufacturing the conductive carbon nanotube tip
- 专利标题(中): 导电性碳纳米管尖端,具有导电性碳纳米管尖端的探针,以及导电性碳纳米管尖端的制造方法
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申请号: US11513197申请日: 2006-08-31
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公开(公告)号: US07507958B2公开(公告)日: 2009-03-24
- 发明人: Sang-jun Choi , Jung-hyun Lee , Sang-bong Bang , Bum-seok Seo , Chang-soo Lee
- 申请人: Sang-jun Choi , Jung-hyun Lee , Sang-bong Bang , Bum-seok Seo , Chang-soo Lee
- 申请人地址: KR Suwon-Si, Gyeonggi-Do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si, Gyeonggi-Do
- 代理机构: Buchanan Ingersoll & Rooney PC
- 优先权: KR10-2006-0004170 20060114
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
A conductive carbon nanotube tip and a manufacturing method thereof are provided. The conductive carbon nanotube tip includes a carbon nanotube tip substantially vertically placed on a substrate, and a ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the substrate. The manufacturing method includes substantially vertically placing a carbon nanotube tip on a substrate, and forming a ruthenium coating layer on the carbon nanotube tip and at least a part of the substrate.
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