发明授权
- 专利标题: Method of inspecting defects
- 专利标题(中): 检查缺陷的方法
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申请号: US10809321申请日: 2004-03-26
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公开(公告)号: US07508973B2公开(公告)日: 2009-03-24
- 发明人: Takafumi Okabe , Shunji Maeda , Yukihiro Shibata , Hidetoshi Nishiyama
- 申请人: Takafumi Okabe , Shunji Maeda , Yukihiro Shibata , Hidetoshi Nishiyama
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2003-089630 20030328; JP2003-183933 20030627
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G06F3/048
摘要:
A method of inspecting detects includes assigning a plurality of sets of image acquisition conditions, executing inspection using each of the sets of conditions, classifying all detected defects into real defects and false defects by use of an automatic defect classification function, and selecting, from the plurality of sets of conditions, a set of conditions ideal for detection.
公开/授权文献
- US20040228515A1 Method of inspecting defects 公开/授权日:2004-11-18