发明授权
US07515982B2 Combining automated and manual information in a centralized system for semiconductor process control
失效
将自动化和手动信息结合在用于半导体过程控制的集中式系统中
- 专利标题： Combining automated and manual information in a centralized system for semiconductor process control
- 专利标题（中）： 将自动化和手动信息结合在用于半导体过程控制的集中式系统中
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申请号： US11480076申请日： 2006-06-30
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公开(公告)号： US07515982B2公开(公告)日： 2009-04-07
- 发明人: Aishwarya Varadhan , Murali Krishna , Bo Li , Johnny Hsiang Wu , Chandra Mouli , Ross A. Giddings
- 申请人： Aishwarya Varadhan , Murali Krishna , Bo Li , Johnny Hsiang Wu , Chandra Mouli , Ross A. Giddings
- 申请人地址： US CA Santa Clara
- 专利权人： Intel Corporation
- 当前专利权人： Intel Corporation
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Trop, Pruner & Hu, P.C.
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
In one embodiment, the present invention includes a method for receiving entries in a database, each corresponding to a semiconductor lot to be processed, automatically assigning each of the entries to a process tool, and dynamically dispatching the semiconductor lot corresponding to an assigned entry to the corresponding assigned process tool based on status information of the assigned process tool. Other embodiments are described and claimed.
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