发明授权
US07517806B2 Integrated circuit having pairs of parallel complementary FinFETs
失效
具有成对的并联互补FinFET的集成电路
- 专利标题: Integrated circuit having pairs of parallel complementary FinFETs
- 专利标题(中): 具有成对的并联互补FinFET的集成电路
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申请号: US11186748申请日: 2005-07-21
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公开(公告)号: US07517806B2公开(公告)日: 2009-04-14
- 发明人: Andres Bryant , William F. Clark, Jr. , David M. Fried , Mark D. Jaffe , Edward J. Nowak , John J. Pekarik , Christopher S. Putnam
- 申请人: Andres Bryant , William F. Clark, Jr. , David M. Fried , Mark D. Jaffe , Edward J. Nowak , John J. Pekarik , Christopher S. Putnam
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb IP Law
- 代理商 Richard M. Kotulak, Esq
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
A method and structure for an integrated circuit structure that utilizes complementary fin-type field effect transistors (FinFETs) is disclosed. The invention has a first-type of FinFET which includes a first fin, and a second-type of FinFET which includes a second fin running parallel to the first fin. The invention also has an insulator fin positioned between the source/drain regions of the first first-type of FinFET and the second-type of FinFET. The insulator fin has approximately the same width dimensions as the first fin and the second fin, such that the spacing between the first-type of FinFET and the second-type of FinFET is approximately equal to the width of one fin. The invention also has a common gate formed over channel regions of the first-type of FinFET and the second-type of FinFET. The gate includes a first impurity doping region adjacent the first-type of FinFET and a second impurity doping region adjacent the second-type of FinFET. The differences between the first impurity doping region and the second impurity doping region provide the gate with different work functions related to differences between the first-type of FinFET and the second-type of FinFET. The first fin and the second fin have approximately the same width.
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