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US07520998B2 Method of fabricating micro actuator having media stage 失效
具有介质载物台的微型致动器的制造方法

Method of fabricating micro actuator having media stage
摘要:
A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.
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