发明授权
- 专利标题: Method of fabricating micro actuator having media stage
- 专利标题(中): 具有介质载物台的微型致动器的制造方法
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申请号: US11595876申请日: 2006-11-13
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公开(公告)号: US07520998B2公开(公告)日: 2009-04-21
- 发明人: Hong-sik Park , Seung-bum Hong , Jong-youp Shim
- 申请人: Hong-sik Park , Seung-bum Hong , Jong-youp Shim
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2005-0126099 20051220
- 主分类号: C23F1/00
- IPC分类号: C23F1/00
摘要:
A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.
公开/授权文献
- US20070137780A1 Method of fabricating micro actuator having media stage 公开/授权日:2007-06-21
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