发明授权
- 专利标题: Test structure for electromigration analysis and related method
- 专利标题(中): 电迁移分析测试结构及相关方法
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申请号: US11830368申请日: 2007-07-30
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公开(公告)号: US07521952B2公开(公告)日: 2009-04-21
- 发明人: Kaushik Chanda , Ronald G. Filippi , Ping-Chuan Wang
- 申请人: Kaushik Chanda , Ronald G. Filippi , Ping-Chuan Wang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Hoffman Warnick LLC
- 代理商 Lisa Jaklitsch
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; G01R19/00 ; H01L23/58
摘要:
A test structure for electromigration and related method are disclosed. The test structure may include an array of a plurality of multilink test sets, each multilink test set including a plurality of metal lines positioned within a dielectric material and connected in a serial configuration; each multilink test set being connected in a parallel configuration with the other multilink test sets, the parallel configuration including a first electrical connection to a cathode end of a first metal line in each multilink test set and a second electrical connection to an anode end of a last metal line in each multilink test set.
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