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US07527480B2 Micropump for integrated device for biological analyses 有权
用于生物分析的集成器件的微型泵

Micropump for integrated device for biological analyses
Abstract:
A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).
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