Invention Grant
US07528374B2 Sensing apparatus having optical assembly that collimates emitted light for detection
有权
具有将发射光准直的光学组件的检测装置用于检测
- Patent Title: Sensing apparatus having optical assembly that collimates emitted light for detection
- Patent Title (中): 具有将发射光准直的光学组件的检测装置用于检测
-
Application No.: US11366540Application Date: 2006-03-03
-
Publication No.: US07528374B2Publication Date: 2009-05-05
- Inventor: Asbjorn Smitt , Jason Lee , Sung Woon Lee , Sigird Smitt-Jeppesen
- Applicant: Asbjorn Smitt , Jason Lee , Sung Woon Lee , Sigird Smitt-Jeppesen
- Applicant Address: US VA Herndon
- Assignee: VIDAR Systems Corporation
- Current Assignee: VIDAR Systems Corporation
- Current Assignee Address: US VA Herndon
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: G01J5/02
- IPC: G01J5/02

Abstract:
An apparatus for optical sensing of samples includes an optical source, an optical assembly, a sample holder, an objective lens, and a detector. The objective lens collimates light emitted by the sample. Preferably, the optical assembly rotates about an axis, allowing the sensing apparatus to sense results from plural locations on a sample without moving the sample. Moving the sample in a linear direction while rotating the optical assembly allows sensing of an entire sample. Preferably, light from the optical source enters the optical assembly along the axis of rotation. Sensing methods consistent with the invention are also described.
Public/Granted literature
- US20070205365A1 Sensing apparatus having optical assembly that collimates emitted light for detection Public/Granted day:2007-09-06
Information query