发明授权
US07528943B2 Method and apparatus for simultaneous high-speed acquisition of multiple images 有权
同时高速采集多幅图像的方法和装置

Method and apparatus for simultaneous high-speed acquisition of multiple images
摘要:
A method and apparatus for simultaneous high-speed inspection and acquisition of multiple data channels is provided. The method and apparatus enables inspecting semiconductor wafers and reticles and comprises converting a single image region into two image sections, reorienting one image into a transposed configuration enabling simultaneous scanning of two inspected object locations with a single sensor, and controlling acquisition parameters for a second image by using information collected from a first image in a feedback arrangement. The design provides a dual-linear or time-delay-integration sensor operating in a split readout configuration mode to simultaneously provide data from two regions of the sensor using two sets of readout circuitry.
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