发明授权
- 专利标题: Method and apparatus for simultaneous high-speed acquisition of multiple images
- 专利标题(中): 同时高速采集多幅图像的方法和装置
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申请号: US11318715申请日: 2005-12-27
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公开(公告)号: US07528943B2公开(公告)日: 2009-05-05
- 发明人: David L. Brown , Yung-Ho Chuang
- 申请人: David L. Brown , Yung-Ho Chuang
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Technologies Corporation
- 当前专利权人: KLA-Tencor Technologies Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Smyrski Law Group, A P.C.
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A method and apparatus for simultaneous high-speed inspection and acquisition of multiple data channels is provided. The method and apparatus enables inspecting semiconductor wafers and reticles and comprises converting a single image region into two image sections, reorienting one image into a transposed configuration enabling simultaneous scanning of two inspected object locations with a single sensor, and controlling acquisition parameters for a second image by using information collected from a first image in a feedback arrangement. The design provides a dual-linear or time-delay-integration sensor operating in a split readout configuration mode to simultaneously provide data from two regions of the sensor using two sets of readout circuitry.
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