发明授权
- 专利标题: Semiconductor flash memory device and method of fabricating the same
- 专利标题(中): 半导体闪存器件及其制造方法
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申请号: US11648057申请日: 2006-12-29
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公开(公告)号: US07531410B2公开(公告)日: 2009-05-12
- 发明人: Yong-Suk Choi , Jeong-Uk Han , Hee-Seog Jeon , Seung-Jin Yang , Hyok-Ki Kwon
- 申请人: Yong-Suk Choi , Jeong-Uk Han , Hee-Seog Jeon , Seung-Jin Yang , Hyok-Ki Kwon
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronic Co., Ltd.
- 当前专利权人: Samsung Electronic Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR10-2006-0048945 20060530
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A semiconductor flash memory device. The flash memory device includes a floating gate electrode disposed in a recess having slanted sides in a semiconductor substrate. A gate insulation film is interposed between the floating gate electrode and the semiconductor substrate. A control gate electrode is disposed over the floating gate electrode. The floating gate electrode includes projections adjacent to the slanted sides of the recess.
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