发明授权
US07531410B2 Semiconductor flash memory device and method of fabricating the same 失效
半导体闪存器件及其制造方法

Semiconductor flash memory device and method of fabricating the same
摘要:
A semiconductor flash memory device. The flash memory device includes a floating gate electrode disposed in a recess having slanted sides in a semiconductor substrate. A gate insulation film is interposed between the floating gate electrode and the semiconductor substrate. A control gate electrode is disposed over the floating gate electrode. The floating gate electrode includes projections adjacent to the slanted sides of the recess.
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