Invention Grant
- Patent Title: Inductively-coupled toroidal plasma source
- Patent Title (中): 电感耦合环形等离子体源
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Application No.: US11636891Application Date: 2006-12-11
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Publication No.: US07541558B2Publication Date: 2009-06-02
- Inventor: Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
- Applicant: Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: B23K10/00
- IPC: B23K10/00

Abstract:
Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
Public/Granted literature
- US20070145018A1 Inductively-coupled toroidal plasma source Public/Granted day:2007-06-28
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