发明授权
US07543546B2 Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method
失效
等离子体处理装置,等离子体生成用反应容器的制造方法以及等离子体处理方法
- 专利标题: Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method
- 专利标题(中): 等离子体处理装置,等离子体生成用反应容器的制造方法以及等离子体处理方法
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申请号: US10529861申请日: 2004-05-26
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公开(公告)号: US07543546B2公开(公告)日: 2009-06-09
- 发明人: Tetsuji Shibata , Keiichi Yamazaki , Noriyuki Taguchi , Yasushi Sawada
- 申请人: Tetsuji Shibata , Keiichi Yamazaki , Noriyuki Taguchi , Yasushi Sawada
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Works, Ltd.
- 当前专利权人: Matsushita Electric Works, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Cheng Law Group PLLC
- 优先权: JP2003-149961 20030527; JP2003-330351 20030922
- 国际申请: PCT/JP2004/007598 WO 20040526
- 国际公布: WO2004/107394 WO 20041209
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A plasma treatment apparatus is provided, which enables to increase a treatment area and provide good treatment uniformity. This apparatus comprises a pair of electrode plates having a plurality of through holes and an insulating plate having a plurality of through holes. The insulating plate is disposed between the electrode plates such that positions of the through holes of the electrode plates correspond to the positions of the through holes of the insulating plate. A plurality of discharge spaces are formed by the through holes of the electrode plates and the through holes of the insulating plate. By applying a voltage between the electrode plates, while supplying a plasma generation gas into the discharge spaces, plasmas are generated simultaneously in the discharge spaces, and sprayed on an object to efficiently perform a large-area, uniform plasma treatment.
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