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1.发明授权Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method 失效等离子体处理装置，等离子体生成用反应容器的制造方法以及等离子体处理方法公开(公告)号：US07543546B2
公开(公告)日：2009-06-09
申请号：US10529861
申请日：2004-05-26
IPC分类号： C23C16/00
CPC分类号： H01J37/32009 , H01J37/32357 , H01J37/3244 , H01J37/32541 , H01J2237/3325
摘要： A plasma treatment apparatus is provided, which enables to increase a treatment area and provide good treatment uniformity. This apparatus comprises a pair of electrode plates having a plurality of through holes and an insulating plate having a plurality of through holes. The insulating plate is disposed between the electrode plates such that positions of the through holes of the electrode plates correspond to the positions of the through holes of the insulating plate. A plurality of discharge spaces are formed by the through holes of the electrode plates and the through holes of the insulating plate. By applying a voltage between the electrode plates, while supplying a plasma generation gas into the discharge spaces, plasmas are generated simultaneously in the discharge spaces, and sprayed on an object to efficiently perform a large-area, uniform plasma treatment.
摘要翻译： 提供了一种能够增加处理面积并提供良好的处理均匀性的等离子体处理装置。 该装置包括具有多个通孔的一对电极板和具有多个通孔的绝缘板。 绝缘板设置在电极板之间，使得电极板的通孔的位置对应于绝缘板的通孔的位置。 多个放电空间由电极板的通孔和绝缘板的通孔形成。 通过在电极板之间施加电压，在将等离子体产生气体供应到放电空间中的同时，在放电空间中同时产生等离子体，并喷射到物体上以有效地进行大面积均匀的等离子体处理。
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2.发明申请Plasma treatment apparatus, method of producing reaction vessel for plasma generation, and plasma treatment method 失效等离子体处理装置，等离子体生成用反应容器的制造方法以及等离子体处理方法公开(公告)号：US20060042545A1
公开(公告)日：2006-03-02
申请号：US10529861
申请日：2004-05-26
IPC分类号： C23C16/00
CPC分类号： H01J37/32009 , H01J37/32357 , H01J37/3244 , H01J37/32541 , H01J2237/3325
摘要： A plasma treatment apparatus is provided, which enables to increase a treatment area and provide good treatment uniformity. This apparatus comprises a pair of electrode plates having a plurality of through holes and an insulating plate having a plurality of through holes. The insulating plate is disposed between the electrode plates such that positions of the through holes of the electrode plates correspond to the positions of the through holes of the insulating plate. A plurality of discharge spaces are formed by the through holes of the electrode plates and the through holes of the insulating plate. By applying a voltage between the electrode plates, while supplying a plasma generation gas into the discharge spaces, plasmas are generated simultaneously in the discharge spaces, and sprayed on an object to efficiently perform a large-area, uniform plasma treatment.
摘要翻译： 提供了一种能够增加处理面积并提供良好的处理均匀性的等离子体处理装置。 该装置包括具有多个通孔的一对电极板和具有多个通孔的绝缘板。 绝缘板设置在电极板之间，使得电极板的通孔的位置对应于绝缘板的通孔的位置。 多个放电空间由电极板的通孔和绝缘板的通孔形成。 通过在电极板之间施加电压，在将等离子体产生气体供应到放电空间中的同时，在放电空间中同时产生等离子体，并喷射到物体上以有效地进行大面积均匀的等离子体处理。
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公开(公告)号：US20100147464A1
公开(公告)日：2010-06-17
申请号：US12527503
申请日：2008-02-13
CPC分类号： H01J37/32366 , B08B7/0035 , H01J37/32009 , H05H1/2406 , H05H2001/2418 , H05H2001/483
摘要： The present invention relates to a plasma treatment apparatus for treating an object to be treated by activating a plasma production gas by an electric discharge, and by blowing this activated plasma production gas onto the object to be treated. A covered electrode is formed by embedding a conductive layer in an insulating substrate made of a ceramic sintered body. The covered electrodes are arranged opposed to each other to form an electric discharge space in a space between the covered electrodes. A power supply is included for causing an electric discharge in the electric discharge space by applying a voltage to the conductive layers. Since no ceramic material is sprayed, it is possible to reduce the costs of the material for the covered electrodes, and to simplify the process for manufacturing the covered electrodes. The ceramic sintered body has a smaller percentage of voids and is thus denser than a coating film formed by spraying a ceramic material, which is less likely to cause dielectric breakdown during an electric discharge.
摘要翻译： 等离子体处理装置技术领域本发明涉及一种等离子体处理装置，其用于通过放电来激活等离子体产生气体，并将该活化的等离子体产生气体吹送到待处理物体上来对待处理物体进行处理。 覆盖电极通过在由陶瓷烧结体制成的绝缘基板中嵌入导电层而形成。 被覆电极彼此相对布置，以在被覆电极之间的空间中形成放电空间。 包括用于通过向导电层施加电压而在放电空间中放电的电源。 由于没有喷涂陶瓷材料，因此可以降低覆盖电极的材料的成本，并且简化用于制造被覆电极的工艺。 陶瓷烧结体具有较小的空隙百分比，因此比通过喷涂形成的涂膜更致密，陶瓷材料在放电期间不太可能引起电介质击穿。
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公开(公告)号：US06503065B2
公开(公告)日：2003-01-07
申请号：US09777440
申请日：2001-02-06
申请人： Kohya Tanaka , Tetsuji Shibata
发明人： Kohya Tanaka , Tetsuji Shibata
IPC分类号： F04B3906
CPC分类号： F01P5/06 , F01P1/02 , F04D17/162 , F04D25/02 , F04D29/424
摘要： An engine blower with excellent engine cooling capacity and sufficient efficiency in restraining noises without deteriorating the blower performance is offered. A fan provided with vanes to create the wind for the blower and the wind for cooling the engine on both side of the rotating plate is rotated inside the blower case in order to cool the engine, the air in the engine case provided with an air inlet port is suctioned into the blower case from the inlet provided on the wall separating the engine case and the blower case by utilizing the negative pressure created by rotation of the fan, the cylinder inside the engine case is cooled by the air passing from the air inlet port to the blower case via the engine case, and the engine noise emitted to the outside from the air inlet port from the engine case is minimized by passing the air in the engine case to the blower case from the air inlet port.
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