- 专利标题: Liquid flow controller and precision dispense apparatus and system
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申请号: US10520635申请日: 2003-07-18
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公开(公告)号: US07543596B2公开(公告)日: 2009-06-09
- 发明人: Marc Laverdiere , Robert F. McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
- 申请人: Marc Laverdiere , Robert F. McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
- 申请人地址: US MN Chaska
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MN Chaska
- 代理机构: Nields, Lemack & Frame, LLC
- 国际申请: PCT/US03/22579 WO 20030718
- 国际公布: WO2004/010474 WO 20040129
- 主分类号: G05D7/06
- IPC分类号: G05D7/06
摘要:
Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
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